MFM 유량계

Available Ranges

10 sccm to 3000 slpm

Accuracy at calibration conditions after tare

±2% Full Scale

Repeatability

±0.2% Full Scale

Zero Shift and Span Shift

0.02% Full Scale / ºCelsius / Atm

Operating Range / Turndown Ratio

2% to 100% Full Scale / 50:1 Turndown

Maximum Flow Rate

up to 128% Full Scale (Gas Dependent)

Typical Response Time

100 ms (Adjustable)

Warm-up Time

< 1 Second

Operating Temperature

−10 to +60 ºCelsius

Maximum Internal Pressure

320 psig

Proof Pressure

400 psig

Mounting Attitude Sensitivity

None

Ingress Protection

IP40

Wetted Materials

303 & 302 Stainless Steel, Viton®, Heat Cured Silicone Rubber, Glass Reinforced Polyphenylene Sulfide, Heat Cured Epoxy, Aluminum, Gold, Brass, 430FR Stainless Steel, Silicon, Glass.

Monochrome LCD or Color TFT Display
with integrated touchpad

Simultaneously displays Mass Flow, Volumetric Flow, Pressure and
Temperature

Digital Output Signal¹ Options

RS-232 Serial / RS-485 Serial / Modbus RTU / PROFIBUS / EtherNet/IP / DeviceNet / Modbus TCP/IP / EtherCAT

Analog Output Signal² Options

0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA

Optional Secondary Analog Output Signal²

0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA

Electrical Connection Options

8-Pin Mini-DIN / 9-pin D-sub (DB9) / 15-pin D-sub (DB15) / 6-pin locking / 8-pin M12

Supply Voltage

12 to 30 Vdc (15-30 Vdc for 4-20 mA outputs)

Supply Current

0.250 Amp